Variable Capacitance Accelerometer

Variable Capacitance Accelerometers are lower-range MEMS accelerometers (Micro Element Mechanical System) manufactured using microelectronic fabrication technique. Unlike IEPE or piezoelectric accelerometer, MEMS variable capacitance accelerometers can measure static or DC acceleration with frequency down to 0 Hz. They also possess distinct features such as high sensitivity, low power consumption, excellent linearity and independent of temperature. This makes them ideal for measurement of low noise vibration, motion or seismic applications.

Variable Capacitance Accelerometer Overview