The confocalDT IFS2407-xHT/VAC from Micro-Epsilon is a confocal chromatic sensor built for precise distance and thickness measurement in demanding high-temperature and vacuum environments. Designed for continuous operation at temperatures up to 200 °C, it combines a robust, compact stainless steel body with submicron accuracy, making it well suited to installations where space is limited and thermal stability is critical.
Available in measuring ranges of 0.8 mm, 2 mm and 4 mm, the sensor delivers a static resolution down to < 6 nm and linearity to < ±0.16 µm across displacement and distance measurements. A temperature stability from < 0.005 % FSO / K keeps readings dependable as ambient conditions change, while a light spot diameter as small as 11 µm supports fine, localised measurement. The sensor works reliably on reflective, diffuse and transparent surfaces such as glass, and is fully compatible with the IFC controller range for measuring rates up to 30 kHz.
By dispensing with organic adhesives, the stainless steel construction achieves low outgassing and is suitable for use up to ultra-high vacuum, an ideal choice for semiconductor manufacturing and precision machine building. Models with a 90° beam path and pluggable optical fibre connections let the sensor be flexibly adapted to different installation situations. Bestech Australia supplies the confocalDT IFS2407-xHT/VAC, backed by technical support from application engineers.
Applications and Case Studies
- Electronics and semiconductor industries
- Glass industry
- Medical technology
- Accurate position detection of wafer tables in vacuum
Key Features
- Measuring ranges: 0.8 mm, 2 mm and 4 mm
- Resolution: < 6 nm (static)
- Linearity: < ±0.16 µm (displacement and distance)
- Operating temperature: +5 to +200 °C
- Vacuum compatibility: up to UHV (IP40, vacuum compatible)





