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IMS5600-DS | White light interferometer with subnanometer accuracy

The IMS5600-DS white light interferometer is used for distance and thickness measurement applications that require the highest precision level. Its capability to measure with picometer resolutions make this interferometer suitable for measurement in semiconductor and electronic manufacturing applciation. This compact sensor has robust design in a metal housing for non-contact distance and thickness measurement in industrial application such as in production line. The sensor can be optionally designed with highly flexible fibre optic cable with 10m length to allow for spatial separation between the sensor and the controller. Therefore, the controller can be separately installed in a control cabinet via DIN rail mounting to provide stable measurement results. Optional sensors, cables and feed through accessories are also available for measurement in vacuum environment such as in clean room or ultra high vacuum (UHV).

The IMS5600-DS interferometer sensor generates a very small light spot diameter of 10  microns for detection of fine details such as textured structure and miniaturized electronic components. It can also detect step profiles, heights as well as depression with high signal stability. The controller also has integrated interface with Ethernet, EtherCAT and RS422 as well as other synchronization inputs module and digital I/O to enable connection into modern control system and program. The initial operating parameters can be easily set-up via user-friendly web interface without additional software.

Key features:
  • Measurement range: 2.1mm
  • Resolution: < 30pm
  • Measuring rate: adjustable from 100Hz to 6kHz
  • Passive cooling
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